Tribology Issues and Opportunities in Mems: Proceedings of the NSF AFSOR ASME Workshop on Tribology Issues and Opportunities in MEMS
This volume contains the Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS, held in Columbus, Ohio, USA, 9-11 November, 1997. Micro Electro Mechanical Systems (MEMS) is a rapidly growing industry. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surface chemistry and materials science in the operation and manufacturing of many MEMS devices and these issues...
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This volume contains the Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS, held in Columbus, Ohio, USA, 9-11 November, 1997. Micro Electro Mechanical Systems (MEMS) is a rapidly growing industry. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surface chemistry and materials science in the operation and manufacturing of many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The MEMS community needs to be exposed to state-of-the-art tribology and vice versa, and this was the specific aim of the workshop. Better tribological understanding of MEMS will advance the state of the art in micromachining and in the IC industry in general. For example, better understanding will contribute to better performance prediction for micromachined pressure sensors, accelerometers and gyros as well as a better understanding of stiction behaviour of micro-mirrors and micromotors and of the influence of roughness on micro-fluids. This volume will be of interest to researchers, manufacturers and potential users of MEMS and experts in tribology (including mechanics, mechanical properties and surface modification). Booknews Contains 46 articles, four breakout session reports, and a panel discussion report from the November 1997 workshop that explored issues related to tribology, mechanics, surface chemistry, and material sciences in the operation and manufacturing of micro electro mechanical systems (MEMS). Sample article topics are microfabrication technologies for high performance microactuators; biosensors and microfluidic systems; rough surface characterization; the status of micro/nanotribology of engineering interfaces; tribological issues of polysilicon surface-micromachining; active friction control using ultrasonic vibration; reliability and fatigue testing of MEMS; and surface modification and mechanical properties of bulk silicon. Annotation c. by Book News, Inc., Portland, Or.
PrefaceMEMS R&D in Europe1Integrated MEMS in Conventional CMOS17Facilitating Choices of Machining Tools and Materials for 'Miniaturization Science': A Review31Microfabrication Technologies for High Performance Microactuators53Surface Characterization of Non-Lithographic Micromachining73Biosensors and Microfluidic Systems85Power MEMS Materials and Structures95MEMS Opportunities in Accelerometers and Gyros and the Microtribology Problems Limiting Commercialization109New Technology and Applications at Lucas NovaSensor121Rough Surface Characterization135Frictional Instabilities149Wear of Ceramics and Metals157Mechanics of Wear: From Conventional Components to MEMS165Rheological Modeling of Thin Film Lubrication175Surface Roughness Induced Effects in Hydrodynamic Lubrication185Transition from Elastohydrodynamic to Partial Lubrication207Micro/Nanotribology: State of the Art and Its Applications229Pulsed Force Mode: A New Method for Characterizing Thin Silane Films by Adhesive Force Measurements247Formation of Nanometer-Scale Contacts to Viscoelastic Materials: Implications for MEMS261Nanotribology of Vapor-Phase Lubricants273The Tribology of Hydrocarbon Surfaces Investigated Using Molecular Dynamics285Dual-Axis Piezoresistive AFM Cantilever for Independent Detection of Vertical and Lateral Forces301Statistical Thermodynamic Treatment of the AFM Tip in Liquid313Tribological Issues of Polysilicon Surface-Micromachining325Advantages and Limitations of Silicon as a Bearing Material for MEMS Applications341Surface Force Induced Failures in Microelectromechanical Systems367Development, Fabrication and Testing of a Multi-Stage Micro Gear System397Analysis of Gear Tooth Performance of Mechanically-Coupled, Outer-Rotor Polysilicon Micromotors403Micro/Nanotribological Studies of Single-Crystal Silicon and Polysilicon and SiC Films for Use in MEMS Devices407Phase Transformations in Semiconductors under Contact Loading431Influence of Water Adsorption on Microtribology of Micromachines443Tribological Effects of Surface Roughness in MEMS Devices455Active Friction Control Using Ultrasonic Vibration463Contact Resistance Measurements and Modeling of an Electrostatically Actuated Microswitch471Metrology for MEMS Tribology481Mechanical Property Determination Using Nanoindentation Techniques487Stress in Thin Films for MEMS Actuators509Reliability and Fatigue Testing of MEMS519Surface Modification and Mechanical Properties of Bulk Silicon529Microfriction and Microwear Experiments on Metal Containing Amorphous Hydrocarbon Hard Coatings Using an Atomic Force Microscope: Mechanisms, Models and Micro- versus Macrotests539Formation of Carbon Films on Ceramic Carbides by High Temperature Chlorination559Deposition and Characterization of Diamond-Like Materials567Wear and Nanomechanical Studies of Silicon Oxide and Silicon Nitride Thin Films for MEMS Applications579a-SiC Thin Films Deposited Using Pulsed Laser Ablation of Graphite and Magnetron Sputtering of Silicon onto Steel Substrates at Room Temperature591Lubrication of Polysilicon Micromechanisms with Alkylsiloxane Self-Assembled Monolayers: Coefficient of Static Friction Measurements597Tribological Properties of Modified MEMS Surfaces607Breakout Session Report: Tribology Research in MEMS615Breakout Session Report: Mechanisms of Nano-Scale Tribology and Instrumentation for MEMS Devices619Breakout Session Report: Lubricants, Overcoats and Surface Modification Techniques627Breakout Session Report: Mechanical Property Measurements629Panel Discussion Report: Tribology Issues and Opportunities in MEMS633List of Participants641Editor's Vita647Subject Index649
\ BooknewsContains 46 articles, four breakout session reports, and a panel discussion report from the November 1997 workshop that explored issues related to tribology, mechanics, surface chemistry, and material sciences in the operation and manufacturing of micro electro mechanical systems (MEMS). Sample article topics are microfabrication technologies for high performance microactuators; biosensors and microfluidic systems; rough surface characterization; the status of micro/nanotribology of engineering interfaces; tribological issues of polysilicon surface-micromachining; active friction control using ultrasonic vibration; reliability and fatigue testing of MEMS; and surface modification and mechanical properties of bulk silicon. Annotation c. by Book News, Inc., Portland, Or.\ \
