The MEMS Handbook (Mechanical Engineering)
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The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS.The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.
PrefaceEditor-in-ChiefContributors1Introduction2Scaling of Micromechanical Devices3Mechanical Properties of MEMS Materials4Flow Physics5Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains6Liquid Flows in Microchannels7Burnett Simulations of Flows in Microdevices8Molecular-Based Microfluidic Simulation Models9Lubrication in MEMS10Physics of Thin Liquid Films11Bubble/Drop Transport in Microchannels12Fundamentals of Control Theory13Model-Based Flow Contol for Distributed Architectures14Soft Computing in Control15Materials for Microelectromechanical Systems16MEMS Fabrication17LIGA and Other Replication Techniques18X-Ray-Based Fabrication19Electrochemical Fabrication (EFAB)20Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS21Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide22Microfabricated Chemical Sensors for Aerospace Applications23Packaging of Harsh-Environment MEMS Devices24Inertial Sensors25Micromachined Pressure Sensors26Sensors and Actuators for Turbulent Flows27Surface-Micromachined Mechanisms28Microrobotics29Microscale Vacuum Pumps30Microdroplet Generators31Micro Heat Pipes and Micro Heat Spreaders32Microchannel Heat Sinks33Flow Control34Reactive Control for Skin-Friction Reduction35Towards MEMS Autonomous Control of Free-Shear Flows36Fabrication Technologies for Nanoelectromechanical SystemsIndex
