Selected Papers on Optical MEMS

Section 1MEMS Technology--Review Papers on Fabrication and Various DevicesSilicon as a mechanical material (Proceedings of the IEEE 1982)3Silicon micromechanics: sensors and actuators on a chip (IEEE Spectrum 1990)41Microfabricated hinges (Sensors and Actuators A: Physical 1992)46Micromachines on the march (IEEE Spectrum 1994)54Micro-opto-electro-mechanical systems (Optical Engineering 1994)66Micromachined free-space integrated micro-optics (Sensors and Actuators A: Physical 1995)79Application of micromachining technology to optical devices and systems (in Micromachining and Microfabrication Process Technology II, S.W. Pang, S.-C. Chang, editors, 1996)87Micro-opto-electro-mechanical devices and on-chip optical processing (Optical Engineering 1997)97Section 2Displays/Adaptive OpticsCommercial CMOS foundry thermal display for dynamic thermal scene simulation (in Infrared Imaging Systems: Design, Analysis, Modeling, and Testing IV, G.C. Holst, editor, 1993)115128[times]128 deformable mirror device (IEEE Transactions on Electron Devices 1983)122A multiplexed silicon infrared thermal imager (in Transducers '91, International Conference on Solid-State Sensors and Actuators 1991)129Deformable-mirror spatial light modulators (in Spatial Light Modulators and Applications III, U. Efron, editor, 1989)133Mirrors on a chip (IEEE Spectrum 1993)150Fabrication and characterization of a micromachined deformable mirror for adaptive optics applications (in Space Astronomical Telescopes and Instruments II, P.Y. Bely, J.B. Breckinridge, editors, 1993)155Line-addressable torsional micromirrors for light modulator arrays (Sensors and Actuators A: Physical 1994)165Deformable grating light valves for high resolution displays (in Solid-State Sensor and Actuator Workshop 1994)171512[times]512 infrared scene projector array for low-background simulations (in Solid-State Sensor and Actuator Workshop 1994)177Implementation and characterization of a flexure-beam micromechanical spatial light modulator (Optical Engineering 1994)183Digital micromirror device imaging bar for hardcopy (in Color Hard Copy and Graphic Arts IV, J. Bares, Editor, 1995)189Advanced modeling of micromirror devices (in International Conference on Integrated Micro/Nanotechnology for Space Applications 1995)197High speed interferometric device for real-time correction of aero-optic effects (in 26th AIAA Plasmadynamics and Lasers Conference 1995)213Implementation of hexagonal micromirror arrays as phase-mostly spatial light modulators (in Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications, W. Bailey, M.E. Motamedi, F.-C. Luo, editors, 1995)224Projection display systems based on the Digital Micromirror Device (DMD) (in Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications, W. Bailey, M.E. Motamedi, F.-C. Luo, editors, 1995)236A method for designing electrostatic-actuator electrode pattern in micromachined deformable mirrors (Sensors and Actuators A: Physical 1996)248Deformable micromirror devices as phase-modulating high-resolution light valves (Sensors and Actuators A: Physical 1996)255Micro-opto-electro-mechanical (MOEM) adaptive optic system (in Miniaturized Systems with Micro-Optics and Micromechanics II, M.E. Motamedi, L.J. Hornbeck, K.S.J. Pister, editors, 1997)261Development of microelectromechanical deformable mirrors for phase modulation of light (Optical Engineering 1997)274Continuous-membrane surface-micromachined silicon deformable mirror (Optical Engineering 1997)281Use of micro-electro-mechanical deformable mirrors to control aberrations in optical systems: theoretical and experimental results (Optical Engineering 1997)288Aberration-correction results from a segmented microelectromechanical deformable mirror and a refractive lenslet array (Optics Letters 1998)301Technology and applications of micromachined silicon adaptive mirrors (Optical Engineering 1997)304Thermally actuated piston micromirror arrays (in Optical Scanning Systems: Design and Applications, L. Beiser, S.F. Sagan, editors, 1997)313Section 3Beam Steering/ScanningThe development of polysilicon micromotors for optical scanning applications (in Solid-State Sensor and Actuator Workshop 1994)327Diffraction grating scanners using polysilicon micromotors (in IEEE 8th International Workshop on Micro Electro Mechanical Systems 1995)332Surface-micromachined free-space micro-optical systems containing three-dimensional microgratings (Applied Physics Letters 1995)3382-dimensional optical scanner applying a torsional resonator with 2 degrees of freedom (in IEEE 8th International Workshop on Micro Electro Mechanical Systems 1995)341Out-of-plane refractive microlens fabricated by surface micromachining (IEEE Photonics Technology Letters 1996)345Surface-micromachined mirrors for laser-beam positioning (Sensors and Actuators A: Physical 1996)348Linear vibromotor-actuated micromachined microreflector for integrated optical systems (in Solid-State Sensor and Actuator Workshop 1996)353Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners (in IEEE 9th Annual International Workshop on Micro Electro Mechanical Systems 1996)357Polysilicon micromechanical gratings for optical modulation (Sensors and Actuators A: Physical 1996)363Arrays of thermal micro-actuators coupled to micro-optical components (in Actuator Technology and Applications, A.E. Hatheway, editor, 1996)370Microactuated micro-XYZ stages for free-space micro-optical bench (in MEMS '97, IEEE 10th Annual International Workshop on Micro Electro Mechanical Systems 1997)379Micro-electro-mechanical variable blaze gratings (in MEMS '97, IEEE 10th Annual International Workshop on Micro Electro Mechanical Systems 1997)385Two-dimensional miniature optical-scanning sensor with silicon micromachined scanning mirror (in Miniaturized Systems with Micro-Optics and Micromechanics II, M.E. Motamedi, L.J. Hornbeck, K.S.J. Pister, editors, 1997)392Scanning and rotating micromirrors using thermal actuators (in Optical Scanning Systems: Design and Applications, L. Beiser, S.F. Sagan, editors, 1997)404Micromachined electromagnetic scanning mirrors (Optical Engineering 1997)415Self-assembled microactuated XYZ stages for optical scanning and alignment (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)424Actuated polysilicon micromirrors for raster-scanning displays (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)428Section 4SpectrometersIntegrated grating/detector array fabricated in silicon using micromachining techniques (Sensors and Actuators A: Physical 1992)435Miniaturized spectrometers for biochemical analysis (in Solid-State Sensor and Actuator Workshop 1996)443Tunable IR filters with integral electromagnetic actuators (in Solid-State Sensor and Actuator Workshop 1996)447Optical performance of high-aspect LIGA gratings (Optical Engineering 1997)451Surface-micromachined diffraction gratings for scanning spectroscopic applications (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)458Section 5Communications/SwitchingMicroactuators for aligning optical fibers (Sensors and Actuators A: Physical 1989)463Miniature Fabry-Perot interferometers micromachined in silicon for use in optical fiber WDM systems (in Transducers '91, International Solid-State Conference on Sensors and Actuators 1991)472Microchopper-modulated IR microlamp (in Solid-State Sensor and Actuator Workshop 1994)476Microfabricated optical chopper (Optical Engineering 1994)480Surface micromachined tuneable interferometer array (Sensors and Actuators A: Physical 1994)489Micro-opto-mechanical devices fabricated by anisotropic etching of (110) silicon (Journal of Micromechanics and Microengineering 1995)496A piezoelectrically operated optical chopper by quartz micromachining (Journal of Microelectromechanical Systems 1995)504Fabrication of a mechanical antireflection switch for fiber-to-the-home systems (Journal of Microelectromechanical Systems 1996)511Megahertz opto-mechanical modulator (Sensors and Actuators A: Physical 1996)518Tunable three-dimensional solid Fabry-Perot etalons fabricated by surface-micromachining (IEEE Photonics Technology Letters 1996)523Surface micromachined Fabry-Perot tunable filter (IEEE Photonics Technology Letters 1996)526Optically excited self-resonant microbeams (Sensors and Actuators A: Physical 1996)529Micromachined 1[times]2 optical-fiber switch (Sensors and Actuators A: Physical 1996)536Micro-optical and opto-mechanical systems fabricated by the LIGA technique (in Miniaturized Systems with Micro-Optics and Micromechanics II, M.E. Motamedi, L.J. Hornbeck, K.S.J. Pister, editors, 1997)541The potential of transmittive microoptical systems for miniaturized scanners, modulators and switches (in Miniaturized Systems with Micro-Optics and Micromechanics II, M.E. Motamedi, L.J. Hornbeck, K.S.J. Pister, editors, 1997)547Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications (Journal of Microelectromechanical Systems 1997)Optical communication using micro corner cube reflectors (in MEMS '97, 10th IEEE International Workshop on Micro Electro Mechanical Systems 1997)568Microjoinery for optomechanical systems (in Miniaturized Systems with Micro-Optics and Micromechanics II, M.E. Motamedi, L.J. Hornbeck, K.S.J. Pister, editors, 1997)574A micro shutter for applications in optical and thermal detectors (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)582Surface-micromachined free-space fiber optic switches with integrated microactuators for optical fiber communication systems (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)586An electromagnetic MEMS 2[times]2 fiber optic bypass switch (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)590Micro-optical gate for fiber optic communication (in Transducers '97, International Conference on Solid-State Sensors and Actuators 1997)594Section 6Lasers/DetectorsSilicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers (IEEE Photonics Technology Letters 1996)601Widely and continuously tunable micromachined resonant cavity detector with wavelength tracking (IEEE Photonics Technology Letters 1996)604Wide and continuous wavelength tuning in a vertical-cavity surface-emitting laser using a micromachined deformable-membrane mirror (Applied Physics Letters 1996)607InP-based micro-mechanical tunable and selective photodetector for WDM systems (in Miniaturized Systems with Micro-Optics and Micromechanics II, M.E. Motamedi, L.J. Hornbeck, K.S.J. Pister, editors, 1997)610Surface micromachined long wavelength LED/photodetector with a continuous tuning range of 75 nm (in MEMS '97, IEEE 10th Annual International Workshop on Micro Electro Mechanical Systems 1997)616