RF MEMS: Theory, Design, and Technology
Suitable as a tutorial for electrical and computer engineering students, or as an up-to-date reference for practicing circuit designers, RF MEMS provides the most comprehensive available survey of this new and important technology.
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Practical and theoretical coverage of RF MEMS for circuits and devicesNew RF and microwave frequency MEMS (microelectromechanical systems) have potentially enormous and widespread applications in the telecommunications industry. Components based on this technology—such as switches, varactors, and phase shifters—exhibit virtually no power consumption or loss, making them ideally suited for use in modern telecommunications and wireless devices.This book sets out the basics of RF MEMS and describes how to design practical devices and circuits. As well as covering fundamentals, Gabriel Rebeiz offers expert tips for designers and presents a range of real-world applications. Throughout, the author utilizes actual engineering examples to illustrate basic principles in theory and practice. Detailed discussion of cutting-edge fabrication and packaging techniques is provided. Suitable as a tutorial for electrical and computer engineering students, or as an up-to-date reference for practicing circuit designers, RF MEMS provides the most comprehensive available survey of this new and important technology.
Preface1Introduction: RF MEMS for Microwave Applications12Mechanical Modeling of MEMS Devices: Static Analysis213Mechanical Modeling of MEMS Devices: Dynamic Analysis594Electromagnetic Modeling of MEMS Switches875MEMS Switch Library1216MEMS Switch Fabrication and Packaging1577MEMS Switch Reliability and Power Handling1858Design of MEMS Switch Circuits2219MEMS Phase Shifters25910Distributed MEMS Phase Shifters and Switches29711MEMS Varactors and Tunable Oscillators32712Micromachined Inductors35913Reconfigurable MEMS Networks, Filters, Antennas, and Subsystems38314Phase Noise Analysis of MEMS Circuits, Phase Shifters, and Oscillators42915Future Work in RF MEMS449App. ADetailed Analysis and Measurements of Intermodulation Distortion and Power Handling in RF MEMS Switches, Varactors, and Tunable Filters457App. BMechanical, Electrical, and Thermal Properties of RF MEMS Materials473Index479
\ From the Publisher"...an excellent book for graduate students or practicing engineers in the field of RF microwave technology who need to learn about the latest developments in the RF MEMS world." (IEEE Electrical Insulation Magazine, November/December 2004)\ "It provides the most comprehensive survey of this new and important technology.” (Microwave Journal, January 2004)\ "...an invaluable addition to the research library, and highly recommended to all interested in this fascinating technology." (Microwaves & RF, June 2003)\ \ \
