Microsystems Technology
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This collection describes the techniques most commonly used in microsystem fabrication, evaluates the techniques through case studies of the major applications on the market, and overviews methods for designing and testing micro-electrical mechanical systems (MEMS). The contributors compare microelectronic and microsystem technologies, walk through the steps in the surface micromachining process, and outline the basic topology of electrostatic microactuators. Other topics of the 12 papers include the LIGA microfabrication technique, wafer bonding, and permanent magnets for MAGMAS. Originally published in French as Microsystem technology in 2002 by Hermes Science Publications. Distributed by Stylus Publishing. Annotation ©2004 Book News, Inc., Portland, OR
Forward1From Microelectronics to Microtechnology12An Overview of Surface Micromachining273Bulk Micromachining and MEMS Packaging434Electrostatic Micro-actuators755The LIGA Microfabrication Technique1176A review of Wafer Bonding1477Single-crystal Silicon Micro-opto-electro-mechanical Devices1738Permanent Magnets for MAGMAS1959RF MEMS for the Mobile Communications Era: Present and Future21310From Microelectronics to Integrated Microsystems Testing24111Reliability and Failure Analysis Issues in MEMS26312CoventorWare MEMS Design Methodology281Index293
