MEMS/MOEM Packaging: Concepts, Designs, Materials and Processes
While MEMS technology has progressed rapidly, commercialization of MEMS has been hindered by packaging technology barriers and costs. One of the key issues in the industrialization of MEMS, MOEM and ultimately Nanoelectrical devices is the development of appropriate packaging solutions for the protection, assembly, and long term reliable operation. This book rigorously examines the properties of the materials used in MEMS and MOEN assembly then evaluates them in terms of their routing,...
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AUTHORITATIVE, COST-EFFECTIVE SOLUTIONS FOR MEMS AND MOEMS ASSEMBLIESThis is a rigorous examination of design concepts, fabrication processes, and properties of materials used in MEMS and MOEMS package construction and assembly, detailing routing, electrical performance, thermal management, hermeticity level, and reliability. The author also describes advanced packaging methods, including:Wafer-level packaging Microfluidic device packaging Optical MEMS packaging RF and microwave packaging Laser sealingReaders will find in-depth coverage of assembly technology and manufacturability, including cost issues.CONTENT THAT SOLVES MEMS AND MOEMS PACKAGING & ASSEMBLY PROBLEMS:Engineering fundamentals of packaging for MEMS and MOEMS devices Principles, materials, and fabrication of MEMS and MOEMS devices Evaluation methods for MEMS and MOEMS packaging challenges MEMS packaging processes From MEMS and MOEMS to nanotechnologyKen Gilleo, Ph.D., is the CEO of ET-Trends, a consulting, packaging design, and IP firm specializing in emerging technologies. The firm’s projects include novel materials and packages and processes for MEMS, MOEMS, and optoelectronics. Dr. Gilleo is a member of IEEE and IMAPS, and he is also Vice President of Technical Programs for the Surface Mount Technology Association (SMTA). He has been actively involved in the development of new products for 30 years and is an inventor in circuitry, electronics materials, and packaging. Dr. Gilleo has 30 U.S. patents, and his products have received three R&D 100 Awards. Dr. Gilleo resides in Warwick, Rhode Island.
Ch. 1Engineering fundamentals of MEMS and MOEMS electronic packaging1Ch. 2Principles, materials, and fabrication of MEMS and MOEMS devices29Ch. 3MEMS and MOEMS packaging challenges and strategies65Ch. 4MEMS packaging processes121Ch. 5MEMS packaging materials159Ch. 6From MEMS and MOEMS to nanotechnology183
