MEMS Handbook
As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This bestselling handbook is now more convenient than ever, and its coverage...
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As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This bestselling handbook is now more convenient than ever, and its coverage is unparalleled. MEMS: Introduction and Fundamentals The first volume covers the theoretical and conceptual underpinnings of the field, emphasizing the physical phenomena that dominate at the micro-scale. It also explores the mechanical properties of MEMS materials, modeling and simulation of MEMS, control theory, and bubble/drop transport in microchannels. Chapters were updated where necessary, and the book also includes two new chapters on microscale hydrodynamics and lattice Boltzmann simulations. This volume builds a strong foundation for further study and work in the MEMS field. MEMS: Design and Fabrication This second volume details the techniques, technologies, and materials involved in designing and fabricating MEMS devices. It begins with an overview of MEMS materials and then examines in detail various fabrication and manufacturing methods, including LIGA and macromolding, X-ray based fabrication, EFAB® technology, and deep reactive ion etching. This book includes three new chapters on polymeric-based sensors and actuators, diagnostic tools, and molecular self-assembly. It is a thorough guide to the important aspects of design and fabrication. MEMS: Applications This third volume offers a broad overview of current, emerging, and possible future MEMS applications. It surveys inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, reactive control for skin-friction reduction, and microchannel heat sinks, among many others. Two new chapters discuss microactuators and nonlinear electrokinetic devices. This book is vital to understanding the current and possible capabilities of MEMS technologies. In addition to seven new chapters, existing chapters were updated and expanded where necessary to reflect the current state of the field. In all, The MEMS Handbook, Second Edition comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling field of MEMS.
Volume 1 MEMS: Introduction and Fundamentals Introduction; Mohamed Gad-el-Hak Scaling of Micromechanical Devices; William Trimmer and Robert H. Stroud Mechanical Properties of MEMS Materials; William N. Sharpe, Jr. Flow Physics; Mohamed Gad-el-Hak Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains; Robert M. Kirby, George Em Karniadakis, Oleg Mikulchenko, and Kartikeya Mayaram Molecular-Based Microfluidic Simulation Models; Ali Beskok Hydrodynamics of Small-Scale Internal Gaseous Flows; Nicolas G. Hadjiconstantinou Burnett Simulations of Flows in Microdevices; Ramesh K. Agarwal and Keon-Young Yun Lattice Boltzmann Simulations of Slip Flows in Microchannels; Ramesh K. Agarwal Liquid Flow in Microchannels; Kendra V. Sharp, Ronald J. Adrian, Juan G. Santiago, and Joshua I. Molho Lubrication in MEMS; Kenneth Breuer Physics of Thin Liquid Films; Alexander Oron Bubble/Drop Transport in Microchannels; Hsueh-Chia Chang Fundamentals of Control Theory; J. William Goodwine Model-Based Flow Control for Distributed Architectures; Thomas R. Bewley Soft Computing in Control; Mihir Sen and Bill Goodwine Index Volume 2 MEMS: Design and Fabrication Introduction; Mohamed Gad-el-Hak Materials for Microelectromechanical Systems; Christian A. Zorman, Mehran Mehregany, and J. Jay McMahon MEMS Fabrication; Guangyao Jia and Marc J. Madou LIGA and Micromolding; Guangyao Jia and Marc J. Madou X-Ray Based Fabrication; Todd Christenson EFAB® Technology and Applications; Adam L. Cohen and Chris A. Bang Single-Crystal Silicon Carbide MEMS: Fabrication, Characterization, and Reliability; Robert S. Okojie Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide; Glenn M. Beheim and Laura J. Evans Polymer Microsystems: Materials and Fabrication; Gary M. Atkinson and Zoubeida Ounaies Optical Diagnostics to Investigate the Entrance Length in Microchannels; Sang-Youp Lee, Jaesung Jang, and Steven T. Wereley Microfabricated Chemical Sensors for Aerospace Applications; Gary W. Hunter, Jennifer C. Xu, Chung-Chiun Liu, and Darby B. Makel Packaging of Harsh Environment MEMS Devices; Liang-Yu Chen and Jih-Fen Lei Fabrication Technologies for Nanoelectromechanical Systems; Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider Molecular Self-Assembly: Fundamental Concepts and Applications; Jill A. Miwa and Federico Rosei Index Volume 3 MEMS: Applications Introduction; Mohamed Gad-el-Hak Inertial Sensors; Paul L. Bergstrom, Melissa L. Trombley, and Gary G. Li Micromachined Pressure Sensors: Devices, Interface Circuits, and Performance Limits; Yogesh B. Gianchandani, Chester G. Wilson, and Jae-Sing Park Surface Micromachined Devices; Andrew D. Oliver and David W. Plummer Microactuators; Alberto Borboni Sensors and Actuators for Turbulent Flows; Lennart Löfdahl and Mohamed Gad-el-Hak Microrobotics; Thorbjörn Ebefors and Göran Stemme Microscale Vacuum Pumps; E. Phillip Muntz, Marcus Young, and Stephen E. Vargo Nonlinear Electrokinetic Devices; Yuxing Ben and Hsueh-Chia Chang Microdroplet Generators; Fan-Gang Tseng Micro Heat Pipes and Micro Heat Spreaders; G.P. “Bud” Peterson and Choondal B. Sobhan Microchannel Heat Sinks; Yitshak Zohar Flow Control; Mohamed Gad-el-Hak Reactive Control for Skin-Friction Reduction; Haecheon Choi Toward MEMS Autonomous Control of Free-Shear Flows; Ahmed Naguib Index
