MEMS and Nanotechnology-based Sensors and Devices for Communications, Medical and Aerospace Applications
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The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devices significantly reduces their weight, size, power consumption, and production costs. These sensors and devices can then play greater roles in defense operations, wireless communication, the diagnosis and treatment of disease, and many more applications. MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications presents the latest performance parameters and experimental data of state-of-the-art sensors and devices. It describes packaging details, materials and their properties, and fabrication requirements vital for design, development, and testing. Some of the cutting-edge materials covered include quantum dots, nanoparticles, photonic crystals, and carbon nanotubes (CNTs). This comprehensive work encompasses various types of MEMS- and NT-based sensors and devices, such as micropumps, accelerometers, photonic bandgap devices, acoustic sensors, CNT-based transistors, photovoltaic cells, and smart sensors. It also discusses how these sensors and devices are used in a number of applications, including weapons’ health, battlefield monitoring, cancer research, stealth technology, chemical detection, and drug delivery.
1 Highlights and Chronological Developmental History of MEMS Devices Involving Nanotechnology2 Potential Actuation Mechanisms, Their Performance Capabilities, and Applications3 Latest and Unique Methods for Actuation4 Packaging, Processing, and Material Requirements for MEMS Devices5 RF-MEMS Switches Operating at Microwave and mm-Wave Frequencies6 RF/Microwave MEMS Phase Shifter7 Applications of Micropumps and Microfluidic8 Miscellaneous MEMS/Nanotechnology Devices and Sensors for Commercial and Military Applications9 Materials for MEMS- and Nanotechnology-Based Sensors and DevicesIndex
