Introduction to Microelectromechanical Microwave Systems
Microelectromechanical microwave systems are the product of integrated circuit technology, mechanical engineering, materials science, and microwave communications. This completely updated, second edition of an Artech House bestseller brings together all the principles, techniques, methods, and theories from these different fields to provide you with a full, all-encompassing introduction to microelectromechanical microwave systems.
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De Los Santos, president of a company engaged in RF MEMS and nanotechnology research and consulting, brings together principles, techniques, methods, and theories from integrated circuit technology, mechanical engineering, materials science, and microwave communications to provide an introduction to microelectromechanical microwave systems. This second edition covers the latest in fabrication technologies, actuation mechanisms, packaging, and microwave and wireless applications. Annotation ©2004 Book News, Inc., Portland, OR
1Microelectromechanical systems12Fundamental MEMS device physics253Fundamental MEMS devices : the MEM switch594Fundamental MEMS devices : the MEM resonator875Microwave MEMS applications1216MEMS-based microwave circuits and systems173
