Electroceramic-Based MEMS
Search in google:
The book is focused on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems) in the large sense, including micro-sensors, micro-actuators, and electronic components for high frequency communications. The book covers major topics and is divided into two parts (a) applications and emerging applications, and (b) materials, fabrication technologies, and functioning issues.
Ch. 1MEMS-based thin film and resonant chemical sensors3Ch. 2Microactuators based on thin films19Ch. 3Micromachined ultrasonic transducers and acoustic sensors based on piezoelectric thin films37Ch. 4Thick-film piezoelectric and magnetostrictive devices49Ch. 5Micromachined infrared detectors based on pyroelectric thin films81Ch. 6RF bulk acoustic wave resonators and filters115Ch. 7High frequency tuneable devices based on thin ferroelectric films133Ch. 8MEMS for optical functionality157Ch. 9Ceramic thick films for MEMS177Ch. 10Thin film piezoelectrics for MEMS199Ch. 11Science and technology of high dielectric constant thin films and materials integration for application to high frequency devices217Ch. 12Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics235Ch. 13Microfabrication of piezoelectric MEMS325Ch. 14Non-conventional micro- and nanopatterning techniques for electroceramics361Ch. 15Low-cost patterning of ceramic thin films387
